Advanced CMOS manufacturing of superconducting qubits on 300 mm wafers - Nature
Briefly

Superconducting circuit implementations of quantum bits have leveraged the scalable nature of solid-state fabrication and have shown tremendous progress in terms of qubit coherence times and gate fidelities.
The industrial-scale fabrication of high-coherence qubits utilizing only all-optical lithography and reactive-ion etching of 300-mm-diameter wafers is an attractive alternative for future quantum processors.
Advances in error-correcting codes and quantum gate fidelities could reduce the required number of physical qubits while increasing stability and uniformity would lessen control overhead.
Quantum processors will most probably still need to scale beyond a million physical qubits to achieve practical applications, highlighting the need for continued innovation.
Read at Nature
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