Silva side-footed the ball home in the 84th minute after Chelsea goalkeeper Djordje Petrovic parried a shot from former Blues midfielder Kevin De Bruyne.
Both keepers were busy with missed chances from De Bruyne, Phil Foden, Jack Grealish, Nicolas Jackson, Cole Palmer, and Noni Madueke, showcasing intense gameplay.
City will face either Manchester United or Coventry City in the final on May 25, after a tightly contested semifinal with Chelsea.
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